Dr. Alexander S. Kutyrev Profile

Dr. Alexander S. Kutyrev

at NASA Goddard Space Flight Ctr

SPIE Involvement:

Author

Publications (53)

PROCEEDINGS ARTICLE | August 15, 2018

Development of the Fabry-Perot interferometers for the HIRMES spectrometer on SOFIA

Proc. SPIE. 10708, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy IX

KEYWORDS: Mirrors, Ferroelectric materials, Stars, Fabry–Perot interferometry, Capacitors, Sensors, Spectroscopy, Spectral resolution, Bridges, Planets

Read Abstract +

PROCEEDINGS ARTICLE | July 10, 2018

HIRMES: the third generation instrument for SOFIA (Conference Presentation)

Proc. SPIE. 10708, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy IX

KEYWORDS: Bolometers, Mid-IR, Observatories, Sensors, Spectroscopy, Hydrogen, Detector arrays, Spectral resolution, Infrared astronomy, Solar system

Read Abstract +

We will present a status update on the development of HIRMES, the third generation instrument for SOFIA (Stratospheric Observatory for Infrared Astronomy). HIRMES (HIgh Resolution Mid-infrarEd Spectrometer) will cover the wavelength range between 25 micron and 122 micron with a spectral resolution of up to R~100,000. It will use two arrays of Transition Edge Sensed (TES) bolometers. One of the arrays consists of 8 16-pixel strips, for the high-resolution mode, where the pixel area and backshorts are optimized for 8 different wavelength regimes. The second detector consists of a 16x64 array with excellent sensitivity over the full wavelength range, and it will be used for the mid-resolution (R~19,000) and low-resolution (R~2,000 and R~600) observing modes. Both detector arrays will have background limited performance with NEPs of < 2E-17 W/Hz^(1/2) for the low-resolution array and < 3E-18 W/Hz^(1/2) for the high-resolution array. HIRMES will employ several Fabry-Perot Interferometers (FPI) for the low- (R~2000), mid- (R~19,000), and high-resolution (R~100,000) observing modes. In addition, three gratings with resolutions of R~600 will be used to order-sort FPI transmission peaks, and also to obtain low resolution broad bandwidth spectra. HIRMES's main science goals are to study the evolution of protoplanetary disks as well as to investigate the origin of Hydrogen and Deuterium in the Solar System. The high spectral resolution observations of the HD 1-0 R(0) line at 112 micron will determine the gas mass and kinematics in protoplanetary disks, while the observations of the [OI] 63 micron and H2O lines reveal the amount of Oxygen and H20 within the snowline. Low spectral resolution observations of solid-state H20 ice features at ~43 and ~63 micron will determine the amount of water ice beyond the snowline. Measurements of the molecular hydrogen line and numerous HD lines at mid-resolution will help to estimate the H/D ratio in the Solar System. In addition, the low-resolution FPI is well suited to map fine-structure line emission from nearby galaxies.

PROCEEDINGS ARTICLE | July 10, 2018

Machining of ZnSe grisms for the Rapid Infrared Imager Spectrograph (RIMAS): effect of diamond crystal orientation

Proc. SPIE. 10706, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III

KEYWORDS: Diffraction, Diamond, Diamond machining, Crystals, Inspection, Infrared radiation, Surface finishing

Read Abstract +

PROCEEDINGS ARTICLE | July 6, 2018

UV capabilities of the CETUS multi-object spectrometer (MOS) and NUV/FUV camera

Proc. SPIE. 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray

KEYWORDS: Optical filters, Astronomical spectrometers, Cameras, Ultraviolet radiation, Charge-coupled devices, CCD image sensors, Galactic astronomy, Carbon nanotubes

Read Abstract +

PROCEEDINGS ARTICLE | July 6, 2018

Operation of a H4RG-10 in the NASA Goddard Astrophyiscs Divison IR detector lab testbed

Proc. SPIE. 10709, High Energy, Optical, and Infrared Detectors for Astronomy VIII

KEYWORDS: Infrared detectors, Infrared sensors, Near infrared, Light emitting diodes, Mercury cadmium telluride, Sensors, Photodiodes, Integrated optics, Integrating spheres, Computer aided design

Read Abstract +

PROCEEDINGS ARTICLE | September 5, 2017

Multiplexing in astrophysics with a UV multi-object spectrometer on CETUS, a probe-class mission study

Proc. SPIE. 10401, Astronomical Optics: Design, Manufacture, and Test of Space and Ground Systems

Read Abstract +

PROCEEDINGS ARTICLE | August 29, 2017

Scattered light characterization of FORTIS

Proc. SPIE. 10397, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XX

KEYWORDS: Carbon, Telescopes, Foam, Light scattering, Imaging spectroscopy, 3D modeling, Collimators, Space telescopes, Device simulation, Carbon nanotubes

Read Abstract +

SPIE Journal Paper | April 7, 2017

James Webb Space Telescope microshutter arrays and beyond

Mary Li, Ari-David Brown, Devin Burns, Daniel P. Kelly, Kyowon Kim, Alexander Kutyrev, Samuel Moseley, Vilem Mikula, Lance Oh

JM3 Vol. 16 Issue 02

KEYWORDS: Camera shutters, James Webb Space Telescope, Space telescopes, Optical fabrication, Magnetism, Telescopes, Microelectromechanical systems, Silicon, Aerospace engineering, Astronomical imaging

Read Abstract +

PROCEEDINGS ARTICLE | August 9, 2016

H2RG detector characterization for RIMAS and instrument efficiencies

Proc. SPIE. 9908, Ground-based and Airborne Instrumentation for Astronomy VI

KEYWORDS: Telescopes, Astronomy, Cameras, Sensors, Imaging spectroscopy, Space telescopes, Infrared telescopes, Infrared telescopes, Signal detection, Spectroscopes, Atmospheric optics

Read Abstract +

PROCEEDINGS ARTICLE | August 9, 2016

Wide field of view spectroscopy using solid Fabry-Perot interferometers

Proc. SPIE. 9908, Ground-based and Airborne Instrumentation for Astronomy VI

KEYWORDS: Astronomy, Fabry–Perot interferometry, Cameras, Spectroscopy, Spectroscopy, Image restoration, Refraction, Neodymium, Panoramic photography, Electroluminescent displays, Absorption

Read Abstract +

PROCEEDINGS ARTICLE | July 22, 2016

Technique for diamond machining large ZnSe grisms for the Rapid Infrared/Imager Spectrograph (RIMAS)

Proc. SPIE. 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II

KEYWORDS: Diffraction, Diamond, Spindles, Diamond machining, Germanium, Zinc, Spectral resolution, Infrared radiation, Gamma radiation, Diffraction gratings

Read Abstract +

PROCEEDINGS ARTICLE | July 15, 2016

DDOTI: the deca-degree optical transient imager

Proc. SPIE. 9910, Observatory Operations: Strategies, Processes, and Systems VI

KEYWORDS: Radar, Near infrared, Observatories, Telescopes, Stars, Visualization, Calibration, Databases, Computing systems, Data archive systems

Read Abstract +

PROCEEDINGS ARTICLE | July 8, 2014

Cryogenic optical systems for the rapid infrared imager/spectrometer (RIMAS)

Proc. SPIE. 9147, Ground-based and Airborne Instrumentation for Astronomy V

KEYWORDS: Infrared imaging, Near infrared, Telescopes, Optical filters, Optical design, Cameras, Space telescopes, Infrared radiation, Photometry, Spectroscopes

Read Abstract +

PROCEEDINGS ARTICLE | July 8, 2014

Detector driver systems and photometric estimates for RIMAS

Proc. SPIE. 9147, Ground-based and Airborne Instrumentation for Astronomy V

KEYWORDS: Infrared imaging, Astronomy, LabVIEW, Stars, Sensors, Spectroscopy, Interference (communication), Imaging spectroscopy, Gamma radiation, Atmospheric modeling

Read Abstract +

PROCEEDINGS ARTICLE | July 8, 2014

The development of ground-based infrared multi-object spectrograph based on the microshutter array

Proc. SPIE. 9147, Ground-based and Airborne Instrumentation for Astronomy V

KEYWORDS: Near infrared, Telescopes, Spectrographs, Stars, Spectroscopy, Adaptive optics, Astronomical imaging, Molybdenum, Galactic astronomy, James Webb Space Telescope

Read Abstract +

PROCEEDINGS ARTICLE | September 27, 2013

The development and analysis of cryogenic optical systems for the rapid infrared imager/spectrometer

Proc. SPIE. 8863, Cryogenic Optical Systems and Instruments 2013

KEYWORDS: Telescopes, Optical filters, Refractive index, Cameras, Sensors, Imaging spectroscopy, Lens design, Infrared radiation, Tolerancing, Spectroscopes

Read Abstract +

PROCEEDINGS ARTICLE | September 26, 2013

Calibration and flight qualification of FORTIS

Proc. SPIE. 8859, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XVIII

KEYWORDS: Telescopes, Mirrors, Sensors, Calibration, Microchannel plates, Imaging spectroscopy, Carbon monoxide, James Webb Space Telescope, Camera shutters, Polonium

Read Abstract +

PROCEEDINGS ARTICLE | September 25, 2012

Performance and calibration of H2RG detectors and SIDECAR ASICs for the RATIR Camera

Proc. SPIE. 8453, High Energy, Optical, and Infrared Detectors for Astronomy V

KEYWORDS: Infrared detectors, Infrared cameras, Telescopes, Cameras, Sensors, Space telescopes, Infrared radiation, Cadmium sulfide, James Webb Space Telescope, Cryogenics

Read Abstract +

PROCEEDINGS ARTICLE | September 25, 2012

Software solution for autonomous observations with H2RG detectors and SIDECAR ASICs for the RATIR camera

Proc. SPIE. 8453, High Energy, Optical, and Infrared Detectors for Astronomy V

KEYWORDS: Infrared detectors, Infrared cameras, Human-machine interfaces, Telescopes, Cameras, Sensors, Interfaces, Computing systems, Control systems, Software development

Read Abstract +

PROCEEDINGS ARTICLE | September 24, 2012

First light with RATIR: an automated 6-band optical/NIR imaging camera

Proc. SPIE. 8446, Ground-based and Airborne Instrumentation for Astronomy IV

KEYWORDS: Infrared cameras, Near infrared, Observatories, Telescopes, Optical design, Cameras, Sensors, CCD cameras, Space telescopes, Gamma radiation

Read Abstract +

PROCEEDINGS ARTICLE | September 24, 2012

Mechanical design and integration of the support structure for the Reionization And Transients InfRared Instrument RATIR

Proc. SPIE. 8446, Ground-based and Airborne Instrumentation for Astronomy IV

KEYWORDS: Infrared cameras, Telescopes, Optomechanical components, Sensors, Space telescopes, Infrared radiation, Computer aided design, Mechanical engineering, Optics manufacturing, Solid modeling

Read Abstract +

PROCEEDINGS ARTICLE | September 17, 2012

Automation of the OAN/SPM 1.5-meter Johnson telescope for operations with RATIR

Proc. SPIE. 8444, Ground-based and Airborne Telescopes IV

KEYWORDS: Observatories, Telescopes, Mirrors, Switches, Sensors, Control systems, Space telescopes, Domes, Astronomical telescopes, Charge-coupled devices

Read Abstract +

PROCEEDINGS ARTICLE | September 13, 2012

Cryogenic photogrammetry and radiometry for the James Webb Space Telescope microshutters

Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II

KEYWORDS: Infrared imaging, Visible radiation, Metrology, Cameras, Image processing, Image analysis, Image registration, James Webb Space Telescope, Cryogenics, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | September 14, 2011

Fabrication and calibration of FORTIS

Proc. SPIE. 8145, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XVII

KEYWORDS: Telescopes, Mirrors, Rockets, Sensors, Calibration, Microchannel plates, Imaging spectroscopy, Data acquisition, Galactic astronomy, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | October 4, 2010

A near-infrared spectrometer to measure zodiacal light absorption spectrum

Proc. SPIE. 7735, Ground-based and Airborne Instrumentation for Astronomy III

KEYWORDS: Signal to noise ratio, Telescopes, Fabry–Perot interferometers, Cameras, Sensors, Spectroscopy, Silicon, Optical testing, Spectral resolution, Absorption

Read Abstract +

PROCEEDINGS ARTICLE | September 17, 2010

Overview of EXIST mission science and implementation

Proc. SPIE. 7732, Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray

KEYWORDS: Telescopes, Stars, Sensors, Spectroscopy, X-rays, Imaging spectroscopy, Space telescopes, Space operations, Galactic astronomy, Hard x-rays

Read Abstract +

PROCEEDINGS ARTICLE | August 10, 2010

The design and capabilities of the EXIST optical and infra-red telescope (IRT)

Proc. SPIE. 7731, Space Telescopes and Instrumentation 2010: Optical, Infrared, and Millimeter Wave

KEYWORDS: Observatories, Telescopes, Sensors, Spectroscopy, Image resolution, Imaging spectroscopy, Space telescopes, Infrared telescopes, Optical instrument design, Spectroscopes

Read Abstract +

PROCEEDINGS ARTICLE | July 30, 2010

Fabrication of FORTIS

Proc. SPIE. 7732, Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray

KEYWORDS: Telescopes, Mirrors, Rockets, Sensors, Microchannel plates, Imaging spectroscopy, Galactic astronomy, Baryon acoustic oscillations, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | July 21, 2010

Mechanical configurations for the reionization and transients infrared camera (RATIR)

Proc. SPIE. 7735, Ground-based and Airborne Instrumentation for Astronomy III

KEYWORDS: Infrared cameras, Telescopes, Optical filters, Astronomy, Cameras, Sensors, Interfaces, Finite element methods, Computer aided design, Infrared telescopes

Read Abstract +

PROCEEDINGS ARTICLE | February 17, 2010

JWST microshutter array system and beyond

Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX

KEYWORDS: Microelectromechanical systems, Telescopes, Aerospace engineering, Indium, Silicon, Magnetism, Optical fabrication, Space telescopes, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | September 2, 2009

The EXIST optical and infra-red telescope (IRT) and imager-spectrometer

Proc. SPIE. 7453, Infrared Spaceborne Remote Sensing and Instrumentation XVII

KEYWORDS: Infrared sensors, Infrared imaging, Telescopes, Sensors, Spectroscopy, Image resolution, Imaging spectroscopy, Space telescopes, X-ray telescopes, Spectroscopes

Read Abstract +

PROCEEDINGS ARTICLE | July 15, 2008

Project Lyman

Proc. SPIE. 7011, Space Telescopes and Instrumentation 2008: Ultraviolet to Gamma Ray

KEYWORDS: Telescopes, Near ultraviolet, Stars, Sensors, Spectroscopy, Photons, Ionization, Galactic astronomy, James Webb Space Telescope, Camera shutters

Read Abstract +

We explore the design of a space mission called Project Lyman that has the goal of quantifying the ionization history of the universe from the present epoch to a redshift of z ~ 3. Observations from WMAP and SDSS show that before a redshift of z (Symbol not available. See manuscript.) 6 the first collapsed objects, possibly dwarf galaxies, emitted Lyman continuum (LyC) radiation shortward of 912 &angst; that reionized most of the universe. Theoretical estimates of the LyC escape fraction ( fesc ) required from these objects to complete reionization is fesc ~10%. How LyC escapes from galactic environments, whether it induces positive or negative feedback on the local and global collapse of structures, and the role played by clumping, molecules, metallicity and dust are major unanswered theoretical questions, requiring observational constraint. Numerous intervening Lyman limit systems frustrate the detection of LyC from high z objects. They thin below z ~ 3 where there are reportedly a few cases of apparently very high fesc. At low z there are only controversial detections and a handful of upper limits. A wide-field multi-object spectroscopic survey with moderate spectral and spatial resolution can quantify fesc within diverse spatially resolved galactic environments over redshifts with significant evolution in galaxy assemblage and quasar activity. It can also calibrate LyC escape against Lyα escape, providing an essential tool to JWST for probing the beginnings of reionization. We present calculations showing the evolution of the characteristic apparent magnitude of star-forming galaxy luminosity functions at 900 &angst;, as a function of redshift and assumed escape fraction. These calculations allow us to determine the required aperture for detecting LyC and conduct trade studies to guide technology choices and balance science return against mission cost. Finally we review our efforts to build a pathfinding dual order multi-object spectro/telescope with a (0.5°)2 field-of-view, using a GSFC microshutter array, and crossed delay-line micro-channel plate detector.

PROCEEDINGS ARTICLE | July 14, 2008

High efficiency near infrared spectrometer for zodiacal light spectral study

Proc. SPIE. 7014, Ground-based and Airborne Instrumentation for Astronomy II

KEYWORDS: Signal to noise ratio, Near infrared, Fabry–Perot interferometers, Stars, Sensors, Spectroscopy, Silicon, Interference (communication), Spectral resolution, Absorption

Read Abstract +

PROCEEDINGS ARTICLE | July 12, 2008

Microshutter arrays: high contrast programmable field masks for JWST NIRSpec

Proc. SPIE. 7010, Space Telescopes and Instrumentation 2008: Optical, Infrared, and Millimeter

KEYWORDS: Sensors, Electrodes, Silicon, Optical testing, Micromirrors, Aluminum, Imaging arrays, James Webb Space Telescope, Cryogenics, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | April 30, 2008

Development and operation of the microshutter array system

Proc. SPIE. 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II

KEYWORDS: Electrodes, Metals, Indium, Silicon, Photography, Magnetism, Semiconducting wafers, James Webb Space Telescope, Cryogenics, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | September 26, 2007

A microshutter-based field selector for JWST's multi-object near infrared spectrograph

Proc. SPIE. 6678, Infrared Spaceborne Remote Sensing and Instrumentation XV

KEYWORDS: Near infrared, Spectrographs, Electronics, Silicon, Imaging spectroscopy, Space telescopes, Astronomical imaging, Galactic astronomy, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | September 20, 2007

Microshutter array system for James Webb Space Telescope

Proc. SPIE. 6687, UV/Optical/IR Space Telescopes: Innovative Technologies and Concepts III

KEYWORDS: Sensors, Electrodes, Metals, Indium, Silicon, Magnetism, Optical fabrication, Space telescopes, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | May 3, 2007

Complex MEMS device: microshutter array system for space applications

Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security

KEYWORDS: Microelectromechanical systems, Electrodes, Metals, Indium, Silicon, Magnetism, Optical fabrication, Space telescopes, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | December 20, 2006

MEMS microshutter arrays for James Webb Space Telescope

Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III

KEYWORDS: Microelectromechanical systems, Electrodes, Metals, Indium, Silicon, Magnetism, Optical fabrication, Space telescopes, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | July 7, 2006

Illuminating dark energy with the joint efficient dark-energy investigation (JEDI)

Proc. SPIE. 6265, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter

KEYWORDS: Telescopes, Sensors, Spectroscopy, Imaging spectroscopy, Space telescopes, Infrared radiation, Space operations, Galactic astronomy, Spectroscopes, Baryon acoustic oscillations

Read Abstract +

PROCEEDINGS ARTICLE | February 23, 2005

Microshutter array development for the James Webb space telescope

Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

KEYWORDS: Microelectromechanical systems, Electrodes, Metals, Silicon, Magnetism, Optical fabrication, Reactive ion etching, Semiconducting wafers, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | October 12, 2004

Microshutters arrays for the JWST near-infrared spectrometer

Proc. SPIE. 5487, Optical, Infrared, and Millimeter Space Telescopes

KEYWORDS: Near infrared, Spectrographs, Electrodes, Silicon, Magnetism, Galactic astronomy, Failure analysis, James Webb Space Telescope, Camera shutters, Prototyping

Read Abstract +

PROCEEDINGS ARTICLE | September 30, 2004

Near infrared cryogenic tunable solid Fabry-Perot spectrometer

Proc. SPIE. 5492, Ground-based Instrumentation for Astronomy

KEYWORDS: Near infrared, Refractive index, Fabry–Perot interferometers, Spectroscopy, Germanium, Silicon, Hydrogen, Solids, Cryogenics, Temperature metrology

Read Abstract +

PROCEEDINGS ARTICLE | March 7, 2003

Cryogenic Fabry-Perot spectrometer for the near infrared

Proc. SPIE. 4841, Instrument Design and Performance for Optical/Infrared Ground-based Telescopes

KEYWORDS: Telescopes, Fabry–Perot interferometers, Sensors, Calibration, Spectroscopy, Infrared spectroscopy, Space telescopes, Galactic astronomy, Bromine, Cryogenics

Read Abstract +

PROCEEDINGS ARTICLE | March 5, 2003

Optical design of rapid infrared-visible multi-object spectrometer: a NGST demonstration instrument

Proc. SPIE. 4850, IR Space Telescopes and Instruments

KEYWORDS: Optical design, Cameras, Sensors, Spectroscopy, Silicon, Imaging spectroscopy, Infrared spectroscopy, Spectral resolution, Astronomical imaging, Infrared telescopes

Read Abstract +

PROCEEDINGS ARTICLE | January 16, 2003

Microshutter arrays for near-infrared applications on the James Webb Space Telescope

Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II

KEYWORDS: Microelectromechanical systems, Oxides, Electrodes, Metals, Silicon, Magnetism, Photomasks, Semiconducting wafers, James Webb Space Telescope, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | October 2, 2001

Magnetically actuated microshutter arrays

Proc. SPIE. 4561, MOEMS and Miniaturized Systems II

KEYWORDS: Oxides, Etching, Electrodes, Silicon, Magnetism, Space telescopes, Deep reactive ion etching, Reactive ion etching, Semiconducting wafers, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | April 30, 2001

Fabrication of microshutter arrays for space application

Proc. SPIE. 4407, MEMS Design, Fabrication, Characterization, and Packaging

KEYWORDS: Microelectromechanical systems, Oxides, Etching, Electrodes, Silicon, Magnetism, Space telescopes, Deep reactive ion etching, Semiconducting wafers, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | August 22, 2000

Status of the development of a 128x128 microshutter array

Proc. SPIE. 4178, MOEMS and Miniaturized Systems

KEYWORDS: Etching, Spectroscopy, Ions, Silicon, Micromirrors, Deep reactive ion etching, Reactive ion etching, Astronomical imaging, Semiconducting wafers, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | August 10, 2000

Fracture tests of etched components using a focused ion beam machine

Proc. SPIE. 4180, MEMS Reliability for Critical Applications

KEYWORDS: Statistical analysis, Ions, Silicon, Ion beams, Finite element methods, Reactive ion etching, Failure analysis, Cryogenics, Camera shutters, Standards development

Read Abstract +

PROCEEDINGS ARTICLE | September 3, 1999

Some aspects on the mechanical analysis of microshutters

Proc. SPIE. 3875, Materials and Device Characterization in Micromachining II

KEYWORDS: Data modeling, Crystals, Silicon, Coating, Ion beams, Finite element methods, Analytical research, Lanthanum, Camera shutters, Prototyping

Read Abstract +

PROCEEDINGS ARTICLE | September 2, 1999

Programmable two-dimensional microshutter arrays

Proc. SPIE. 3878, Miniaturized Systems with Micro-Optics and MEMS

KEYWORDS: Microelectromechanical systems, Spectroscopy, Ions, Silicon, Manufacturing, Infrared spectroscopy, Micromirrors, Astronomical imaging, Chemical elements, Camera shutters

Read Abstract +

PROCEEDINGS ARTICLE | July 1, 1990

Intercomparison of American and Soviet stellar image motion monitors

Proc. SPIE. 1236, Advanced Technology Optical Telescopes IV

KEYWORDS: Observatories, Telescopes, Astronomy, Stars, Cameras, Calibration, Astronomical telescopes, Astronomical imaging, Motion measurement, Device simulation

Read Abstract +

Showing 5 of 53 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years