Dr. Alexander D. Lopata
Principal Engineer at Texas Instruments Inc
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | June 1, 1992
OE Vol. 31 Issue 06
KEYWORDS: Semiconducting wafers, Overlay metrology, Error analysis, Optical alignment, Metrology, Distortion, Integrated circuits, Manufacturing, Chlorine, Optical lithography

PROCEEDINGS ARTICLE | June 1, 1990
Proc. SPIE. 1261, Integrated Circuit Metrology, Inspection, and Process Control IV
KEYWORDS: Metrology, Error analysis, Inspection, Photoresist materials, Process control, Integrated circuits, Optical alignment, Semiconducting wafers, Astatine, Overlay metrology

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