Dr. Alexander V. Padiy
at Koninklijke Philips NV
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | January 7, 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Semiconducting wafers, Scanners, Overlay metrology, Lithography, Reticles, Metrology, Control systems, Projection lithography, Calibration, Actuators

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Actuators, Lithography, Reticles, Metrology, Calibration, Scanners, Control systems, Photomasks, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | September 9, 2004
Proc. SPIE. 5380, Optical Data Storage 2004
KEYWORDS: Signal to noise ratio, Optical filters, Detection and tracking algorithms, Sensors, Satellites, Error analysis, Signal processing, Optical tracking, Optical storage, Signal detection

PROCEEDINGS ARTICLE | September 9, 2004
Proc. SPIE. 5380, Optical Data Storage 2004
KEYWORDS: Actuators, Lithium, Laser induced plasma spectroscopy, Near field, Solids, Optical storage, Strontium, Wavelet packet decomposition, Information operations

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