Dr. Alexander A. Popov
at Valiev IPT RAS, Yaroslavl Branch
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Particles, Silicon, Silicon films, Dielectrics, Amorphous silicon, Switching, Plasma, Plasma enhanced chemical vapor deposition, Oxides, Polymerization

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