Alexander Postnikov
at Institute of Physics and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 January 2013
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Etching, Semiconducting wafers, Gyroscopes, Deep reactive ion etching, Silicon, Silica, Microelectromechanical systems, Finite element methods, Photomasks, Oxidation

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