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Mr. Alexander V. Scherbakov
at Institute for Physics of Microstructures RAS
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Publications (1)
PROCEEDINGS ARTICLE | May 31, 2017
Proc. SPIE. 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V
KEYWORDS: Thin films, Optical filters, Mirrors, Multilayers, Sensors, Calibration, Photons, X-rays, Reflectometry, Objectives, Extreme ultraviolet, Charge-coupled devices, Monochromators, EUV optics, Plasma
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