Dr. Alexander Spivak
Senior MEMS Scientist
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 September 2001
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Mathematical modeling, Polishing, Annealing, Silicon, Resistance, Solids, Semiconducting wafers, Failure analysis, Wafer bonding, Fusion energy

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