Mr. Alexander Tritchkov
Staff Process/CAD Engineer at Mentor, a Siemens Business
SPIE Involvement:
Author
Publications (34)

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Photonic devices, Optical lithography, Waveguides, Etching, Manufacturing, Photomasks, Photonic integrated circuits, Optical proximity correction, SRAF, Semiconducting wafers, Resolution enhancement technologies

PROCEEDINGS ARTICLE | October 3, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Lithography, Metals, Image processing, Manufacturing, Data processing, Process control, Photomasks, Cadmium sulfide, Optical proximity correction, Semiconducting wafers

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Photovoltaics, Optical lithography, Defect detection, Visualization, Ions, Distance measurement, Photomasks, Computational lithography, Optical proximity correction, Critical dimension metrology, Bromine

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Finite-difference time-domain method, Manufacturing, 3D modeling, Printing, Image quality, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, SRAF, Semiconducting wafers, Model-based design, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Photovoltaics, Optical lithography, Deep ultraviolet, Image processing, Image resolution, Printing, Pixel resolution, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Photoresist processing, Resolution enhancement technologies, Fiber optic illuminators

SPIE Journal Paper | September 11, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Dysprosium, Photomasks, Immersion lithography, Source mask optimization, Optical proximity correction, Printing, Optical lithography, Visualization, Lens design, Directed self assembly

Showing 5 of 34 publications
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