Alexander Zhivotovsky
Senior Staff Application Engineer
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Optical spheres, Silica, Optical properties, Air contamination, Copper, Light scattering, Inspection, Electron microscopes, Scanning electron microscopy, Bidirectional reflectance transmission function, Latex, Wafer inspection, Optical scanning systems, Semiconducting wafers, Wafer testing, Wafer manufacturing, Classification systems, Defect inspection

Proceedings Article | 17 May 2005
Proc. SPIE. 5755, Data Analysis and Modeling for Process Control II
KEYWORDS: Lithium, Statistical analysis, Data modeling, Error analysis, Computer simulations, Time metrology, Process control, Software development, Information operations, Data analysis

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