Dr. Alexandra C. Barberet
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Reticles, Cadmium, Etching, Control systems, Photomasks, Immersion lithography, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

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