Prof. Alexandre V. Tishchenko
at Univ Lyon
SPIE Involvement:
Publications (28)

Proceedings Article | 16 March 2016 Paper
Proceedings Volume 9781, 97810S (2016)
KEYWORDS: Scanners, Design for manufacturability, Manufacturing, Product engineering, Reticles, Visualization, Image resolution, Chemical mechanical planarization, Sensors, Time metrology, Data modeling, Semiconducting wafers, Optical lithography, Performance modeling, Photomasks

Proceedings Article | 4 September 2015 Paper
Proceedings Volume 9661, 96610R (2015)
KEYWORDS: Scanners, Semiconducting wafers, Polonium, Logic, Sensors, Printing, Photomasks, Electroluminescent displays, Product engineering, Optical lithography

Proceedings Article | 19 March 2015 Paper
Proceedings Volume 9424, 94241C (2015)
KEYWORDS: Semiconducting wafers, Scanners, Sensors, Data modeling, Finite element methods, Silicon, Wafer-level optics, Convolution, Photomasks, Chemical mechanical planarization

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 905223 (2014)
KEYWORDS: Semiconducting wafers, Global system for mobile communications, Optical lithography, Photomasks, Finite-difference time-domain method, Computer simulations, Silicon, Lithography, Wafer-level optics, Optical proximity correction

Proceedings Article | 6 February 2008 Paper
Proceedings Volume 6883, 68830U (2008)
KEYWORDS: Diffraction gratings, Diffraction, Reflection, Interfaces, Silica, Reflectivity, Dielectrics, Coating, Optical design, Antireflective coatings

Showing 5 of 28 publications
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