Alexandre Villaret
at STMicroelectronics
SPIE Involvement:
Publications (7)

Proceedings Article | 4 September 2015 Paper
Proceedings Volume 9661, 96610Q (2015)
KEYWORDS: Photomasks, Liquid phase epitaxy, Optical proximity correction, Lithography, Resolution enhancement technologies, SRAF, Semiconducting wafers, Optical lithography, Visualization, Manufacturing

Proceedings Article | 19 March 2015 Paper
Proceedings Volume 9424, 94241C (2015)
KEYWORDS: Semiconducting wafers, Scanners, Sensors, Data modeling, Finite element methods, Silicon, Wafer-level optics, Convolution, Photomasks, Chemical mechanical planarization

Proceedings Article | 12 April 2013 Paper
Proceedings Volume 8683, 86830E (2013)
KEYWORDS: Optical proximity correction, Photomasks, SRAF, Liquid phase epitaxy, Photovoltaics, Resolution enhancement technologies, Lithography, Bridges, Manufacturing, Printing

Proceedings Article | 13 March 2012 Paper
E. Yesilada, J. Entradas, C. Gardin, J. N. Pena, A. Villaret, V. Farys, C. Beylier, F. Robert, S. Postnikov, A. M. Armeanu, C. Moyroud, F. Chaoui, F. Bernard Granger, O. Toublan
Proceedings Volume 8326, 83262H (2012)
KEYWORDS: Optical proximity correction, SRAF, Lithography, Resolution enhancement technologies, Design for manufacturing, Photomasks, Computational lithography, Inspection, Manufacturing, Optical lithography

Proceedings Article | 16 March 2009 Paper
Franck Foussadier, Emek Yesilada, Jean-Christophe Le Denmat, Yorick Trouiller, Vincent Farys, Frédéric Robert, Gurwan Kerrien, Christian Gardin, Loic Perraud, Florent Vautrin, Alexandre Villaret, Catherine Martinelli, Jonathan Planchot, Jean Luc Di-Maria, Mazen Saied, Mame Kouna Top
Proceedings Volume 7274, 727416 (2009)
KEYWORDS: Optical proximity correction, Critical dimension metrology, Computer simulations, Optical simulations, Optical lithography, Current controlled current source, Optical imaging, Databases, Process modeling, Photomasks

Showing 5 of 7 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top