Alexandru C. Fechete
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 5, 2006
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Thin films, Gas sensors, Sensors, Sputter deposition, Hydrogen, Plasma enhanced chemical vapor deposition, Wave sensors, Magnetic sensors, Acoustics, Indium oxide

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Thin films, Sensors, Sputter deposition, Silicon, Oxygen, Sensor performance, Acoustics, Ozone, Indium oxide, Temperature metrology

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