Prof. Alexei N. Belov
at MIET
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Sensors, Copper, Tungsten, Silicon, Manufacturing, Resistance, Control systems, Silicon films, Semiconducting wafers, Rhenium

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Modulation, Dielectrics, Silicon, Resistance, Conductive coatings, Photomasks, Solid state electronics, Nanolithography, Oxidation

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Thin films, Switching, Metals, Copper, Ions, Chalcogenides, Atomic force microscopy, Scanning electron microscopy, Bismuth, Thin film deposition

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Oxides, Polishing, Metals, Interfaces, Ions, Numerical simulations, 3D modeling, Oxygen, Aluminum, Oxidation

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