Prof. Alexei N. Belov
at MIET
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Thin films, Argon, Sputter deposition, Annealing, Resistance, Zinc, Heat treatments, Oxygen, Atomic layer deposition, Zinc oxide

Proceedings Article | 30 December 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Modulation, Dielectrics, Silicon, Resistance, Conductive coatings, Photomasks, Solid state electronics, Nanolithography, Oxidation

Proceedings Article | 30 December 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Sensors, Copper, Tungsten, Silicon, Manufacturing, Resistance, Control systems, Silicon films, Semiconducting wafers, Rhenium

Proceedings Article | 18 December 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Thin films, Switching, Metals, Copper, Ions, Chalcogenides, Atomic force microscopy, Scanning electron microscopy, Bismuth, Thin film deposition

Proceedings Article | 18 December 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Oxides, Polishing, Metals, Interfaces, Ions, Numerical simulations, 3D modeling, Oxygen, Aluminum, Oxidation

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