Dr. Alexei Vorobiev Profile

Dr. Alexei Vorobiev

at Uppsala Univ.

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Sequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer

Anette Löfstrand, Reza Jafari Jam, Muhammad Mumtaz, Karolina Mothander, Tommy Nylander, Alexei Vorobiev, Ahibur Rahaman, Wen-Chang Chen, Redouane Borsali, Ivan Maximov

Proceedings Volume 11612, 116120W (2021) https://doi.org/10.1117/12.2583803

KEYWORDS: Silicon, Reactive ion etching, Plasma, Optical lithography, FT-IR spectroscopy, Etching, Scanning electron microscopy, Reflectometry, Reflectance spectroscopy, Polymers

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