Dr. Alexey Yu. Illarionov
at ETH Zurich
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Electron beams, Silica, Computer simulations, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Optical simulations, Line edge roughness, TCAD, Line scan image sensors

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