Dr. Alexey V. Romashkin
at National Research Univ of Electronic Technology
SPIE Involvement:
Author
Websites:
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Thin films, Aerosols, Etching, Spectroscopy, Coating, Atomic force microscopy, Ultrasonics, Photoresist materials, Semiconducting wafers, Liquids

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Etching, Polymers, Doping, Atomic force microscopy, Oxygen, Scanning electron microscopy, Ion beams, Gallium, Phase shifts

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