Alexey N. Shatokhin
PhD Student at Moscow Institute of Physics and Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 May 2018 Paper
Eugene Vishnyakov, Igor Kopylets, Valeriy Kondratenko, Alexey Kolesnikov, Alexey Shatokhin, Evgeny Ragozin
Proceedings Volume 10677, 106772L (2018) https://doi.org/10.1117/12.2305926
KEYWORDS: Antimony, Extreme ultraviolet, Multilayers, Reflectivity, Mirrors, Charge-coupled devices, Spectroscopy, Spectrographs, Diffraction, Silicon

Proceedings Article | 24 May 2018 Presentation + Paper
Proceedings Volume 10677, 106770E (2018) https://doi.org/10.1117/12.2305918
KEYWORDS: Spectrographs, Diffraction gratings, Extreme ultraviolet, Spectral resolution, Mirrors, Diffraction, Vacuum ultraviolet, Sensors, Grazing incidence, Plasmas

Proceedings Article | 31 May 2017 Presentation + Paper
Proceedings Volume 10235, 102350L (2017) https://doi.org/10.1117/12.2264992
KEYWORDS: Spectroscopy, Optical design, Imaging spectroscopy, Control systems, Laser induced fluorescence, Plasma, Spectrometers, Extreme ultraviolet, Spatial resolution, Mirrors, Electron beam lithography, Lithography, X-ray optics, X-rays, Sensors, Spectral resolution

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