Alexey I Zotovich
at MSU
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 December 2014 Paper
Proceedings Volume 9440, 944002 (2014) https://doi.org/10.1117/12.2181010
KEYWORDS: Etching, Oxygen, Polymers, Polymer thin films, Chemistry, Dielectrics, Plasma, FT-IR spectroscopy, Ions, Vacuum ultraviolet

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