Alexey I Zotovich
at MSU
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: FT-IR spectroscopy, Etching, Polymers, Dielectrics, Ions, Chemistry, Oxygen, Vacuum ultraviolet, Polymer thin films, Plasma

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