Dr. Ali Mousavian
System Engineer at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 May 2011 Paper
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Confocal microscopy, Chromatic aberrations, Zemax, Microscopes, Mirrors, Light sources, Lenses, Sensors, Objectives, Light

Proceedings Article | 17 June 2009 Paper
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Confocal microscopy, Chromatic aberrations, Microscopes, Mirrors, Light sources, Sensors, Image processing, Spectroscopy, Objectives, Charge-coupled devices

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