Dr. Ali Mousavian
System Engineer at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 May 2011
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Microscopes, Chromatic aberrations, Lenses, Objectives, Confocal microscopy, Mirrors, Zemax, Light, Light sources, Sensors

Proceedings Article | 17 June 2009
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Microscopes, Chromatic aberrations, Mirrors, Charge-coupled devices, Confocal microscopy, Spectroscopy, Image processing, Objectives, Sensors, Light sources

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