Dr. Aliasghar Keyvani Janbahan Profile

Dr. Aliasghar Keyvani Janbahan

Scientist at TNO

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Author

Publications (4)

Proceedings Article | 2 July 2019 Presentation + Paper

Improved sub-surface AFM using photothermal actuation

Maarten v. Reijzen , Mehmet Tamer, Maarten v. Es, Martijn v. Riel , Aliasghar Keyvani, Hamed Sadeghian, Marco v. d. Lans

Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII

KEYWORDS: Actuators, Gold, Modulation, Silicon, Coating, Atomic force microscopy, Frequency modulation, Overlay metrology, Amplitude modulation, Absorption

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Proceedings Article | 26 March 2019 Paper

First results from the Large Dynamic Range Atomic Force Microscope for overlay metrology

G. Witvoet, J. Peters, S. Kuiper, S. Keyvani, R. Willekers

Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII

KEYWORDS: Actuators, Metrology, Interferometers, Atomic force microscopy, Motion measurement, Feedback control, Semiconducting wafers, Overlay metrology

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Proceedings Article | 8 March 2016 Paper

Simultaneous AFM nano-patterning and imaging for photomask repair

Aliasghar Keyvani, Mehmet S. Tamer, Maarten van Es, Hamed Sadeghian

Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX

KEYWORDS: Mathematical modeling, Semiconductors, Diamond, Optical lithography, Silica, Argon, Glasses, Particles, Crystals, Inspection, Fourier transforms, Atomic force microscopy, Time metrology, Photomasks, High volume manufacturing, Nanolithography

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Proceedings Article | 10 April 2015 Paper

Transient tip-sample interactions in high-speed AFM imaging of 3D nano structures

Aliasghar Keyvani, Hamed Sadeghian, Hans Goosen, Fred van Keulen

Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX

KEYWORDS: Semiconductors, Oscillators, Nanoimaging, Stereoscopy, Silicon, Inspection, Atomic force microscopy, Motion models, 3D image processing

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