Dr. Aliasghar Keyvani Janbahan
Scientist at TNO
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 2 July 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Actuators, Gold, Modulation, Silicon, Coating, Atomic force microscopy, Frequency modulation, Overlay metrology, Amplitude modulation, Absorption

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Actuators, Metrology, Interferometers, Atomic force microscopy, Motion measurement, Feedback control, Semiconducting wafers, Overlay metrology

Proceedings Article | 8 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Mathematical modeling, Semiconductors, Diamond, Optical lithography, Silica, Argon, Glasses, Particles, Crystals, Inspection, Fourier transforms, Atomic force microscopy, Time metrology, Photomasks, High volume manufacturing, Nanolithography

Proceedings Article | 10 April 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Semiconductors, Oscillators, Nanoimaging, Stereoscopy, Silicon, Inspection, Atomic force microscopy, Motion models, 3D image processing

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