Alina N. Cismaru
at IMT
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Modeling, Resonators, Silicon, Transducers, Aluminum, Micromachining, Microwave radiation, Semiconducting wafers, Anisotropic etching, Device simulation

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Oxides, Oscillators, Resonators, Etching, Silicon, Magnetism, Photoresist materials, Garnet, Microwave radiation, Semiconducting wafers

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