Allan Minns
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Data mining, Metrology, Statistical analysis, Data modeling, Manufacturing, Diagnostics, Time metrology, Process control, Critical dimension metrology, Semiconducting wafers

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