Dr. Allen Keith Bates
Optical Metrology Engineer
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 5 July 2000
Proc. SPIE. 4000, Optical Microlithography XIII
KEYWORDS: Optical components, Reflectors, Lithography, Silica, Sensors, Dielectrics, Calcium, Reflectivity, Optical testing, Absorption

Proceedings Article | 26 July 1999
Proc. SPIE. 3679, Optical Microlithography XII
KEYWORDS: Optical components, Lithography, Beam splitters, Silica, Birefringence, Calcium, Laser applications, Ozone, Pulsed laser operation, Absorption

Proceedings Article | 7 April 1999
Proc. SPIE. 3578, Laser-Induced Damage in Optical Materials: 1998
KEYWORDS: Lithography, Silica, Calcium, Optical coatings, Reflectivity, Surface roughness, Transmittance, Pulsed laser operation, Surface finishing, Absorption

Proceedings Article | 27 October 1998
Proc. SPIE. 3427, Optical Systems Contamination and Degradation
KEYWORDS: Lithography, Antireflective coatings, Beam splitters, Silica, Birefringence, Calcium, Optical coatings, Reflectivity, Pulsed laser operation, Absorption

Proceedings Article | 29 June 1998
Proc. SPIE. 3334, Optical Microlithography XI
KEYWORDS: Lithography, Refractive index, Reticles, Polymers, Spectroscopy, Nitrogen, Surface roughness, Pellicles, Ozone, Absorption

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top