Allen Park
Marketing Director at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 11, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Semiconductors, Lithography, Logic, Inspection, Signal processing, Wafer inspection, Optical proximity correction, Semiconducting wafers, System on a chip, Defect inspection

PROCEEDINGS ARTICLE | March 4, 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Metrology, Data modeling, Inspection, Finite element methods, Design for manufacturing, Wafer inspection, Optical proximity correction, Semiconducting wafers, Model-based design, Defect inspection

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Metrology, Defect detection, Inspection, Scanning electron microscopy, Microelectronics, Neodymium, Semiconducting wafers, Yield improvement, Classification systems, Defect inspection

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