Alok Vaid
Sr. Manager Process Engineering at GLOBALFOUNDRIES Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (51)

SPIE Journal Paper | August 14, 2018
JM3 Vol. 17 Issue 03
KEYWORDS: Semiconducting wafers, Data modeling, Metrology, Reactive ion etching, Diffractive optical elements, Optics manufacturing, Optical lithography, Scatterometry, Overlay metrology, Transmission electron microscopy

PROCEEDINGS ARTICLE | March 22, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Fin field effect transistors, X-rays, Silicon, Image resolution, Scanning electron microscopy, 3D metrology, Process control, Critical dimension metrology, Overlay metrology

PROCEEDINGS ARTICLE | March 21, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Modulation, Sensors, Etching, Silicon, Signal processing, Semiconducting wafers, Yield improvement, Temperature metrology, Plasma

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Optical lithography, Data modeling, Scanners, 3D modeling, Scanning electron microscopy, Photoresist materials, Optical proximity correction, Critical dimension metrology, Process modeling

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Diffractive optical elements, Fiber optic gyroscopes, Metals, Dielectrics, Electrons, Dielectrophoresis, Personal digital assistants, Process control, Semiconducting wafers

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Thin films, Metrology, Diffractive optical elements, Etching, Chemical species, Dielectrics, Transmission electron microscopy, Scatterometry, Solids, 3D metrology, Process control, Photomasks, Semiconducting wafers, Thin film devices, Channel projecting optics

Showing 5 of 51 publications
Conference Committee Involvement (7)
Metrology, Inspection, and Process Control for Microlithography XXXIII
24 February 2019 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXII
26 February 2018 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXI
27 February 2017 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXX
22 February 2016 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXIX
23 February 2015 | San Jose, California, United States
Showing 5 of 7 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top