Alok P. Vasudev
at Stanford Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 May 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Transparency, Optical lithography, Polymers, Glasses, Scanning electron microscopy, Photoresist materials, Absorbance, Semiconducting wafers, Distributed interactive simulations, Picture Archiving and Communication System

Proceedings Article | 12 June 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Optical lithography, Polymers, Carbonates, Photoresist materials, Absorbance, Fluorine, Semiconducting wafers, Carbon monoxide, Distributed interactive simulations

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