Dr. Aloke Kanjilal
at Purdue Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Mirrors, Contamination, Molecules, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Selenium, Ruthenium, Oxidation

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Mirrors, Contamination, Chemical species, Molecules, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Oxidation

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