Dr. Aloke Kanjilal
at Purdue Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Mirrors, Contamination, Molecules, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Selenium, Ruthenium, Oxidation

Proceedings Article | 23 March 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Mirrors, Contamination, Chemical species, Molecules, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Oxidation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top