Dr. Amalia Torre
at ENEA
SPIE Involvement:
Conference Chair | Author
Publications (11)

Proceedings Article | 3 January 2019
Proc. SPIE. 11042, XXII International Symposium on High Power Laser Systems and Applications
KEYWORDS: Lithography, Optical lithography, Graphene, Silicon, Photoresist materials, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Plasma

Proceedings Article | 30 January 2013
Proc. SPIE. 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012
KEYWORDS: Microscopes, Patents, Ultraviolet radiation, Luminescence, Laser induced fluorescence, Photomasks, Extreme ultraviolet, Transistors, Extreme ultraviolet lithography, Adhesives

Proceedings Article | 22 April 2009
Proc. SPIE. 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
KEYWORDS: Optical filters, Mirrors, X-ray sources, Plasmas, Laser development, Projection systems, Photomasks, Extreme ultraviolet, Krypton, Projection lithography

Proceedings Article | 2 October 2007
Proc. SPIE. 6703, Ultrafast X-Ray Sources and Detectors
KEYWORDS: Mirrors, Fluctuations and noise, Argon, Glasses, Copper, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Krypton, Plasma

Proceedings Article | 26 April 2007
Proc. SPIE. 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
KEYWORDS: Mirrors, Databases, X-rays, Photoresist materials, Extreme ultraviolet, Excimer lasers, Extreme ultraviolet lithography, Pulsed laser operation, Prototyping, Plasma

Showing 5 of 11 publications
Conference Committee Involvement (1)
New Laser Technologies and Applications
1 June 1997 | Olympia, Greece
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