Amir-Hossein Tamaddon
at imec
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Reticles, Etching, Scanners, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Optical lithography, Etching, Image processing, Image analysis, Scanning electron microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Failure analysis

Proceedings Article | 25 March 2019 Presentation + Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Amorphous silicon, Oxides, Optical lithography, Etching, Scanning electron microscopy, Atomic layer deposition, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

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