This paper describes the design and simulation of RF MEMS SPST shunt and SPDT shunt-shunt switches with modified
coplanar waveguide (CPW) configuration for X-band and Ku-band applications exhibiting high isolation and low
insertion loss. By modifying the basic CPW structure for a six-strip membrane having length 720 μm, the resonant
frequency can be reduced from 33.5 GHz to 13.5 GHz with isolation as high as -30 dB(-63 dB at resonant frequency) in
Ku-band. Similar results are also found in case SPST and SPDT switches with other membrane types.