Amitha Govindaraju
at Louisiana Tech Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 16, 2005
Proc. SPIE. 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Lithography, Optical lithography, Particles, Silicon, Micromachining, Microfabrication, Semiconducting wafers, Nanolithography, Temperature metrology, Liquids

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