Dr. Amr Y. Abdo
Senior Member of Technical Staff at GlobalFoundries
SPIE Involvement:
Publications (32)

Proceedings Article | 23 October 2017 Paper
Amr Abdo, Ramya Viswanathan, Donald Samuels, David Conklin
Proceedings Volume 10451, 104510V (2017) https://doi.org/10.1117/12.2281968
KEYWORDS: SRAF, Semiconducting wafers, Data modeling, Optical proximity correction, Photomasks, Printing, Resolution enhancement technologies, Optical lithography, Critical dimension metrology, Performance modeling

Proceedings Article | 18 March 2015 Paper
Ramya Viswanathan, Om Jaiswal, Nathalie Casati, Amr Abdo, James Oberschmidt, Josef Watts, Maria Gabrani
Proceedings Volume 9426, 94260W (2015) https://doi.org/10.1117/12.2086049
KEYWORDS: Statistical modeling, Surface plasmons, Calibration, Data modeling, Optical proximity correction, Metrology, Semiconducting wafers, Optical lithography, Integrated circuit design, Mathematical modeling

Proceedings Article | 31 March 2014 Paper
Nathalie Casati, Maria Gabrani, Ramya Viswanathan, Zikri Bayraktar, Om Jaiswal, David DeMaris, Amr Abdo, James Oberschmidt, Andreas Krause
Proceedings Volume 9052, 90520J (2014) https://doi.org/10.1117/12.2045461
KEYWORDS: Data modeling, Surface plasmons, Calibration, Optical proximity correction, Statistical modeling, Optical lithography, Process modeling, Printing, Image processing, Image quality

Proceedings Article | 14 October 2011 Paper
Amr Abdo, Ramya Viswanathan
Proceedings Volume 8166, 81663R (2011) https://doi.org/10.1117/12.901125
KEYWORDS: Optical proximity correction, Printing, Performance modeling, Process modeling, Semiconducting wafers, Photomasks, Calibration, Scanning electron microscopy, Lithography, Data modeling

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7641, 76410B (2010) https://doi.org/10.1117/12.846637
KEYWORDS: 3D modeling, Critical dimension metrology, Data modeling, Process modeling, Scanning electron microscopy, Semiconducting wafers, Etching, Optical lithography, Printing, 3D image processing

Showing 5 of 32 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top