Anaïs De Lehelle D'Affroux
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11610, Novel Patterning Technologies 2021
KEYWORDS: Nanotechnology, Lithography, Metrology, Optical lithography, Scanning electron microscopy, Photonics, Nanoimprint lithography, Photoresist processing, Semiconducting wafers, Standards development

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