Dr. Anagnostis Paraskevopoulos
Group Leader “Intra-machine communications” at Fraunhofer HHI
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 27 May 2009
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Wafer-level optics, Transceivers, Electron beams, Receivers, Field programmable gate arrays, Free space optics, Integrated optics, Maskless lithography, Semiconducting wafers, Channel projecting optics

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Wafer-level optics, Transmitters, Receivers, Field programmable gate arrays, Data transmission, Data processing, Free space optics, Integrated optics, Maskless lithography, Channel projecting optics

Proceedings Article | 28 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Manufacturing, Photomasks, Computed tomography, Maskless lithography, Semiconducting wafers, Nanofabrication, Prototyping

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