Dr. Anand Gupta
at Real Time Metrology Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Image processing, Particles, Silicon, Inspection, Image filtering, Wafer inspection, Nanoimprint lithography, Semiconducting wafers, Wafer testing

Proceedings Article | 4 September 1998
Proc. SPIE. 3508, Multilevel Interconnect Technology II
KEYWORDS: Oxides, Polishing, Metals, Particles, Copper, Chemistry, Semiconductor manufacturing, Semiconducting wafers, Surface finishing, Chemical mechanical planarization

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