Mr. Anderson Chou Profile

Anderson Chou

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Leveraging x-ray scatterometry and machine learning to enable robust and high-throughput optical critical dimension metrology for advanced 3D flash memory contact hole profile

Houssam Chouaib, Teng Shi, Anderson Chou, Shinya Kawanami, Masatomo Takahara, Yeunchian Luo, Zhijie Leiyin, Bin Zeng, Derrick Shaughnessy, Zhengquan Tan, Kaori Sasaki, Naoki Momotori

Proceedings Volume 12955, 129553F (2024) https://doi.org/10.1117/12.3010992

KEYWORDS: Critical dimension metrology, 3D metrology, 3D modeling, Education and training, Scatterometry, Metrology, Machine learning, X-ray optics, X-rays, Semiconducting wafers

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Proceedings Article | 10 April 2024 Presentation + Paper

Novel ellipsometry metrology-based machine learning technique for low sensitivity characterization of critical dimensions within gate-all-around transistors

Houssam Chouaib, Valeria Dimastrodonato, Anderson Chou, Agostino Cangianoa, Andrew Cross, Derrick Shaughnessy, Zhengquan Tan, Daniel Schmidt, Curtis Durfee, Shanti Pancharatnam, Julien Frougier, Andrew Greene, Mary Breton

Proceedings Volume 12955, 129550L (2024) https://doi.org/10.1117/12.3010790

KEYWORDS: Semiconducting wafers, Education and training, Transmission electron microscopy, Nanosheets, Gallium arsenide, Data modeling, Ellipsometry, Metrology, Diffractive optical elements, Mathematical optimization

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Proceedings Article | 27 April 2023 Poster + Paper

Mueller matrix spectroscopy and physics-based machine learning for gate-all-around sheet-specific metrology

Houssam Chouaib, Anderson Chou, Valeria Dimastrodonato, Shawn Lin, Ben Hsieh, HaoMiao Chang, James Chuang, Brooks Hsiao, Stilian Pandev, Zhengquan Tan, Derrick Shaughnessy

Proceedings Volume 12496, 124962V (2023) https://doi.org/10.1117/12.2658085

KEYWORDS: Education and training, Gallium arsenide, Metrology, Nanosheets, Data modeling, Etching, Silicon, 3D modeling, Mueller matrices, Scatterometry

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