Dr. Andi Putra
at National Univ of Singapore
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, Sensors, Spectroscopy, Manufacturing, Resistance, Photoresist materials, Process control, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 14 December 2006
Proc. SPIE. 6416, Biomedical Applications of Micro- and Nanoengineering III
KEYWORDS: Actuators, Biomedical optics, Nanoengineering, Modulation, Error analysis, Control systems, Neural networks, Motion models, Feedback control, Systems modeling

Proceedings Article | 5 December 2005
Proc. SPIE. 6048, Optomechatronic Actuators and Manipulation
KEYWORDS: Actuators, Biomedical optics, Control systems, Algorithm development, Adaptive control, Motion models, Tolerancing, Systems modeling, Model-based design, Protactinium

Proceedings Article | 5 December 2005
Proc. SPIE. 6048, Optomechatronic Actuators and Manipulation
KEYWORDS: Microelectromechanical systems, Actuators, Surgery, Sensors, Ceramics, Control systems, Wave propagation, Computer engineering, Prototyping, Motion controllers

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