Multipurpose instrument calibration standard for particle beam, scanned probe and optical microscopy: NIST reference material (RM) 8820
Calibrating image roughness by estimating Lipschitz exponents, with applications to image restoration
Photomask dimensional metrology in the scanning electron microscope, part II: High-pressure/environmental scanning electron microscope
Photomask dimensional metrology in the scanning electron microscope, part I: Has anything really changed?
Design and development of a measurement and control system for measuring SEM magnification calibration samples
Potentials of online scanning electron microscope performance analysis using NIST reference material 8091