Direct laser writing via two-photon absorption allows the fabrication of three-dimensional dielectric structures with submicron
resolution by tightly focusing ultrashort laser pulses into a photo-sensitive material with a high-resolution
microscope objective and scanning the laser focus relative to the material. Woodpile photonic crystals fabricated with
this method show a characteristic dip in transmission at near-infrared wavelengths. The spectral position of this
transmission dip scales with the grating period of the fabricated crystals. Metallo-dielectric structures can be obtained by
first fabricating dielectric templates with direct laser writing and subsequently coating the templates with a thin
conformal metal film by electroless plating. Contiguous and conducting silver films can be deposited even on convoluted
The interference of three coherent laser beams of a HeCd-laser with a wavelength of 325 nm was used to create a
periodic intensity distribution into the photo-resist AZ4562. The beam configuration for the laser beam interference was
carefully chosen, so that well defined patterns of two-dimensional periodicity were generated in the photo-resist.
Moulding tools were fabricated from the generated nano-structures via electroforming processes, allowing for a fast
replication of the nano-structured surfaces via hot embossing. Hot embossed polymers were used to increase the
effective surface of micro-fluidic devices like e.g. Polymerase-Chain-Reaction(PCR)-chips. The Nano-structured
surfaces were characterized concerning their contact angles when wetted with de-ionized water. It was found that the
nano-structures influenced the wetting behaviour of micro-fluidic chip surfaces clearly, especially Polypropylene (PP)
surfaces showed a superhydrophobic behaviour.
We present the fundamental concept and experimental results of a new optical sensor structure based on a 1D photonic crystal consisting of a polymer light waveguide, a cladding layer and a nanostructured gold layer. The polysiloxane layers are deposited by spin-coating and dip-coating, respectively. The gold nanostructure is deposited by DCmagnetron sputtering and structured by UV-laser lithography. The gold nanowires have a period of about 400 nm and cover an area of 5×5 mm<sup>2</sup>. This thin flexible structure shows high sensitivity to inclination and strain. Our method enables the fabrication of a new sensor for non-conducting measurement of strain, force, torque and angle.