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Dr. Andrea Conte
Product Manager at SAES Getters SpA
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Publications (4)
Proceedings Article | 31 May 2012 Paper
Lifetime prediction in vacuum packaged MEMS provided with integrated getter film
Proceedings Volume 8353, 83533C (2012) https://doi.org/10.1117/12.920566
KEYWORDS: Microelectromechanical systems, Methane, Gases, Instrument modeling, Microbolometers, Sensors, Carbon monoxide, Thin film devices, Thin films, Metals
Proceedings Article | 3 April 2008 Paper
NEG (non evaporable getter) pumps for organic compounds and water removal in EUVL tools
A. Conte, P. Manini, S. Raimondi
Proceedings Volume 6921, 692138 (2008) https://doi.org/10.1117/12.776061
KEYWORDS: Gases, Extreme ultraviolet lithography, Molecules, Lithography, Hydrogen, Oxides, Contamination, Carbon monoxide, Oxygen, Extreme ultraviolet
Proceedings Article | 14 February 2008 Paper
A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS
A. Bonucci, S. Guadagnuolo, A. Caterino, A. Conte, M. Moraja
Proceedings Volume 6884, 68840M (2008) https://doi.org/10.1117/12.761140
KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Silicon, Molecules, Wafer bonding, Gases, Reliability, Argon, Testing and analysis, Carbon monoxide
Proceedings Article | 6 January 2006 Paper
High and stable Q-factor in resonant MEMS with getter film
A. Conte, M. Moraja, G. Longoni, A. Fourrier
Proceedings Volume 6111, 61110N (2006) https://doi.org/10.1117/12.647710
KEYWORDS: Sensors, Microelectromechanical systems, Semiconducting wafers, Gases, Thin films, Silicon, Packaging, Infrared sensors, Carbon monoxide, Sensor performance
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