Dr. Andrea Conte
Product Manager at SAES Getters SpA
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 31 May 2012
Proc. SPIE. 8353, Infrared Technology and Applications XXXVIII
KEYWORDS: Microelectromechanical systems, Microbolometers, Thin films, Methane, Sensors, Metals, Gases, Carbon monoxide, Thin film devices, Instrument modeling

Proceedings Article | 3 April 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Oxides, Lithography, Contamination, Molecules, Gases, Hydrogen, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon monoxide

Proceedings Article | 14 February 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Microelectromechanical systems, Argon, Molecules, Silicon, Gases, Reliability, Semiconducting wafers, Carbon monoxide, Testing and analysis, Wafer bonding

Proceedings Article | 6 January 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Packaging, Infrared sensors, Thin films, Sensors, Silicon, Gases, Sensor performance, Semiconducting wafers, Carbon monoxide

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