Andrea Weidner
Dipl.- Phys at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Diffraction, Refractive index, Polarization, Crystals, Dielectrics, Reflectivity, Computer simulations, Scatterometry, Scatter measurement, Diffraction gratings

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