Dr. Andreas Bich Profile

Dr. Andreas Bich

at SUSS MicroOptics SA

SPIE Involvement:

Author

Publications (11)

PROCEEDINGS ARTICLE | February 16, 2012

Dynamically deformable reflective membrane for laser beam shaping and smoothing

Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI

KEYWORDS: Wafer-level optics, Actuators, Diffraction, Silicon, Reflectivity, Diffusers, Micromirrors, Optical simulations, Beam shaping, Semiconducting wafers

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PROCEEDINGS ARTICLE | September 21, 2011

Mask aligner process enhancement by spatial filtering

Proc. SPIE. 8170, Illumination Optics II

KEYWORDS: Lithography, Diffraction, Optical filters, Light sources, Lithographic illumination, Spatial filters, Photomasks, Integrated optics, Molybdenum, Semiconducting wafers

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PROCEEDINGS ARTICLE | February 14, 2011

Shaping light with MOEMS

Proc. SPIE. 7930, MOEMS and Miniaturized Systems X

KEYWORDS: Actuators, Mirrors, Ultraviolet radiation, Silicon, Magnetism, Diffusers, Microopto electromechanical systems, Micromirrors, Beam shaping, Pulse shaping

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PROCEEDINGS ARTICLE | February 17, 2010

Deformable silicon membrane for dynamic linear laser beam diffuser

Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX

KEYWORDS: Actuators, Mirrors, Crystals, Silicon, Coating, Magnetism, Semiconductor lasers, Diffusers, Aluminum, Deep reactive ion etching

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PROCEEDINGS ARTICLE | August 24, 2009

Dynamic array spot shaping for laser micro machining

Proc. SPIE. 7430, Laser Beam Shaping X

KEYWORDS: Optical components, Telescopes, Homogenization, Microlens array, Diffractive optical elements, Diffusers, Microlens, Excimer lasers, Beam shaping, Beam homogenizers

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PROCEEDINGS ARTICLE | August 22, 2009

Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping

Proc. SPIE. 7430, Laser Beam Shaping X

KEYWORDS: Actuators, Mirrors, Electrodes, Silicon, Diffusers, Finite element methods, Optical simulations, Beam shaping, Semiconducting wafers, Prototyping

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PROCEEDINGS ARTICLE | September 17, 2008

Refractive statistical concave 1D diffusers for laser beam shaping

Proc. SPIE. 7062, Laser Beam Shaping IX

KEYWORDS: Optical components, Data modeling, Silica, Etching, Diffusion, Diffusers, Microlens, Photomasks, Spherical lenses, Isotropic etching

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PROCEEDINGS ARTICLE | September 12, 2008

Randomly varying micro-optical elements for the generation of uniform intensity profiles in coherent laser sources

Proc. SPIE. 7062, Laser Beam Shaping IX

KEYWORDS: Laser sources, Light sources, Eye, Homogenization, Microlens array, Collimation, Diffusers, Microlens, Spherical lenses, Beam homogenizers

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PROCEEDINGS ARTICLE | February 14, 2008

Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

Proc. SPIE. 6879, Photon Processing in Microelectronics and Photonics VII

KEYWORDS: Diffraction, Telescopes, Mirrors, Homogenization, Microlens array, Laser applications, Diffusers, Microlens, Beam shaping, Beam homogenizers

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PROCEEDINGS ARTICLE | October 15, 2005

Variable phaseplates for focus invariant optical systems

Proc. SPIE. 5962, Optical Design and Engineering II

KEYWORDS: Polishing, Polymethylmethacrylate, Imaging systems, Cameras, Glasses, Manufacturing, Wavefronts, Image filtering, Electronic filtering, Surface finishing

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PROCEEDINGS ARTICLE | May 2, 2005

Research on fabrication of aspheres at the Center of Optics Technology (University of Applied Science in Aalen)

Proc. SPIE. 10315, Optifab 2005: Technical Digest

KEYWORDS: Optical components, Polishing, Metrology, Optical fabrication, Aspheric optics, Aspheric lenses, Optical engineering, Applied sciences, Mechatronics

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Showing 5 of 11 publications

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