Dr. Andreas Bich
at SUSS MicroOptics SA
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Wafer-level optics, Actuators, Diffraction, Silicon, Reflectivity, Diffusers, Micromirrors, Optical simulations, Beam shaping, Semiconducting wafers

PROCEEDINGS ARTICLE | September 21, 2011
Proc. SPIE. 8170, Illumination Optics II
KEYWORDS: Lithography, Diffraction, Optical filters, Light sources, Lithographic illumination, Spatial filters, Photomasks, Integrated optics, Molybdenum, Semiconducting wafers

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Actuators, Mirrors, Ultraviolet radiation, Silicon, Magnetism, Diffusers, Microopto electromechanical systems, Micromirrors, Beam shaping, Pulse shaping

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Actuators, Mirrors, Crystals, Silicon, Coating, Magnetism, Semiconductor lasers, Diffusers, Aluminum, Deep reactive ion etching

PROCEEDINGS ARTICLE | August 24, 2009
Proc. SPIE. 7430, Laser Beam Shaping X
KEYWORDS: Optical components, Telescopes, Homogenization, Microlens array, Diffractive optical elements, Diffusers, Microlens, Excimer lasers, Beam shaping, Beam homogenizers

PROCEEDINGS ARTICLE | August 22, 2009
Proc. SPIE. 7430, Laser Beam Shaping X
KEYWORDS: Actuators, Mirrors, Electrodes, Silicon, Diffusers, Finite element methods, Optical simulations, Beam shaping, Semiconducting wafers, Prototyping

Showing 5 of 11 publications
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