Dr. Andreas Bich
at SUSS MicroOptics SA
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 16 February 2012 Paper
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Wafer-level optics, Actuators, Diffraction, Silicon, Reflectivity, Diffusers, Micromirrors, Optical simulations, Beam shaping, Semiconducting wafers

Proceedings Article | 21 September 2011 Paper
Proc. SPIE. 8170, Illumination Optics II
KEYWORDS: Lithography, Diffraction, Optical filters, Light sources, Lithographic illumination, Spatial filters, Photomasks, Integrated optics, Molybdenum, Semiconducting wafers

Proceedings Article | 14 February 2011 Paper
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Actuators, Mirrors, Ultraviolet radiation, Silicon, Magnetism, Diffusers, Microopto electromechanical systems, Micromirrors, Beam shaping, Pulse shaping

Proceedings Article | 17 February 2010 Paper
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Actuators, Mirrors, Crystals, Silicon, Coating, Magnetism, Semiconductor lasers, Diffusers, Aluminum, Deep reactive ion etching

Proceedings Article | 24 August 2009 Paper
Proc. SPIE. 7430, Laser Beam Shaping X
KEYWORDS: Optical components, Telescopes, Homogenization, Microlens array, Diffractive optical elements, Diffusers, Microlens, Excimer lasers, Beam shaping, Beam homogenizers

Showing 5 of 11 publications
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