Dr. Andreas Erdmann
Head of Computational Lithography & Optics at Fraunhofer IISB
SPIE Involvement:
Conference Program Committee | Conference Chair | Author | Editor | Instructor
Area of Expertise:
lithography , nanooptics , diffraction modeling , image modeling , optical design , physical optics
Publications (166)

Proceedings Article | 22 November 2023 Presentation
Sean D'Silva, Raghunandan Arava, Andreas Erdmann, Thomas Muelders, Hans-Juergen Stock
Proceedings Volume PC12750, PC127500I (2023) https://doi.org/10.1117/12.2691987

Proceedings Article | 5 October 2023 Paper
Sean D'Silva, Raghunandan Arava, Andreas Erdmann, Thomas Mülders, Hans-Jürgen Stock
Proceedings Volume 12802, 1280206 (2023) https://doi.org/10.1117/12.2675700
KEYWORDS: Extreme ultraviolet lithography, Machine learning, Deformation, Liquids, Capillaries, Line width roughness, Image classification, Simulations, Point clouds

Proceedings Article | 26 September 2023 Presentation
Proceedings Volume PC12915, PC129150F (2023) https://doi.org/10.1117/12.3012444

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12495, 124951I (2023) https://doi.org/10.1117/12.2658411
KEYWORDS: Data modeling, Lithography, Scanning electron microscopy, Extreme ultraviolet lithography, Computer simulations

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12293, 122930Y (2022) https://doi.org/10.1117/12.2643246
KEYWORDS: Extreme ultraviolet, Scatterometry, Photomasks, Refractive index, Scattering, Reflectivity, Metrology, Databases, Oxidation, Multilayers, Extreme ultraviolet lithography, Extreme ultraviolet coatings, Modeling and simulation, Optical constants, Optical metrology