Dr. Andreas Frommhold
R&D Engineer at imec
SPIE Involvement:
Publications (33)

Proceedings Article | 10 April 2024 Poster
Mahmudul Hasan, Willem van Mierlo, Jeff Hsia, Natalia Davydova, Andreas Frommhold, Christophe Beral, Anne-Laure Charley, Matteo Beggiato
Proceedings Volume 12955, 129552S (2024) https://doi.org/10.1117/12.3010445
KEYWORDS: Metrology, Scanning electron microscopy, Photoresist materials, Defect inspection, Image quality, Electron beam lithography, Defect detection, Yield improvement, Signal to noise ratio, Semiconducting wafers

Proceedings Article | 29 September 2023 Paper
Proceedings Volume 12915, 1291508 (2023) https://doi.org/10.1117/12.2685814
KEYWORDS: EUV optics, Line width roughness, Signal intensity, Diffraction, Nanoimprint lithography, Spatial frequencies, Critical dimension metrology, Stochastic processes, Source mask optimization, Image transmission

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940N (2023) https://doi.org/10.1117/12.2658714
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Light sources and illumination, Diffraction, Stochastic processes, Design and modelling, Spatial frequencies

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 1249408 (2023) https://doi.org/10.1117/12.2658332
KEYWORDS: Speckle, Simulations, Extreme ultraviolet, Metrology, Critical dimension metrology, Edge roughness

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12494, 124940L (2023) https://doi.org/10.1117/12.2658306
KEYWORDS: Critical dimension metrology, Failure analysis, Random forests, Stochastic processes, Statistical analysis, Scanning electron microscopy

Showing 5 of 33 publications
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