Dr. Andreas Gehner
Head - Adaptive Optics at Fraunhofer Institut fur Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Lithography, Mirrors, Optical lithography, Spatial light modulators, Microopto electromechanical systems, Semiconducting wafers, System on a chip, Surface micromachining

Proceedings Article | 28 February 2020 Paper
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Actuators, Mirrors, Optical lithography, Calibration, Micromirrors, CMOS technology, Analog electronics

SPIE Journal Paper | 1 April 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Actuators, Mirrors, Aluminum, Reflectivity, Micromirrors, CMOS technology, Analog electronics, Deep ultraviolet, Multilayers, Etching

Proceedings Article | 14 February 2007 Paper
Proc. SPIE. 6467, MEMS Adaptive Optics
KEYWORDS: Microelectromechanical systems, Monochromatic aberrations, Mirrors, Imaging systems, Spatial frequencies, Wavefronts, Adaptive optics, Spatial light modulators, Micromirrors, Modulation transfer functions

Proceedings Article | 9 February 2007 Paper
Proc. SPIE. 6467, MEMS Adaptive Optics
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Electrodes, X-rays, Silicon, Reflectivity, Micromirrors, Aluminum, Analog electronics

Showing 5 of 16 publications
Conference Committee Involvement (8)
MEMS Adaptive Optics VIII
2 February 2014 | San Francisco, California, United States
MEMS Adaptive Optics VII
5 February 2013 | San Francisco, California, United States
MEMS Adaptive Optics VI
25 January 2012 | San Francisco, California, United States
MEMS Adaptive Optics V
27 January 2011 | San Francisco, California, United States
MEMS Adaptive Optics IV
27 January 2010 | San Francisco, California, United States
Showing 5 of 8 Conference Committees
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