Dr. Andreas Greiner
at Infineon Technologies Dresden
SPIE Involvement:
Publications (10)

Proceedings Article | 26 June 2017 Paper
Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X
KEYWORDS: Diffraction, Light sources, Metrology, Interferometers, Spectroscopy, Interferometry, Optical testing, Radium, Signal detection, Plasma

Proceedings Article | 20 February 2017 Presentation + Paper
Proc. SPIE. 10110, Photonic Instrumentation Engineering IV
KEYWORDS: Microelectromechanical systems, Semiconductors, Light sources, Interferometers, Calibration, Spectroscopy, Silicon, Interferometry, Optics manufacturing, Temperature metrology

Proceedings Article | 3 May 2016 Paper
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Microelectromechanical systems, Semiconductors, Thin films, Metrology, Interferometers, Sensors, Calibration, Spectroscopy, Silicon, Interferometry, Data acquisition, Spectral calibration, Supercontinuum sources, Semiconducting wafers

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9754, Photonic Instrumentation Engineering III
KEYWORDS: Semiconductors, Light sources, Metrology, Interferometers, Calibration, Spectroscopy, Silicon, Manufacturing, Interferometry, Semiconducting wafers

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9717, Adaptive Optics and Wavefront Control for Biological Systems II
KEYWORDS: Error analysis, Wavefront sensors, Wavefronts, Monte Carlo methods, Wave propagation, Wavefront analysis, Reconstruction algorithms, Applied sciences, Spatial resolution, Wavefront reconstruction, Condition numbers

Showing 5 of 10 publications
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